2011年发表论文

  • 1. Yong Liu, Gang Zhao, Baoqing Li, Li Wen, and Jiaru Chu, "Pattern buried oxide in silicon-on-insulator-based fabrication of floppy single-crystal-silicon cantilevers," IET Micro & Nano Letters 6 (4), 240-243 (2011).

  • 2. Yong Liu, Gang Zhao, Li Wen, Xingzhong Xu, and Jiaru Chu, "Mass-loading effect on quality factor of floppy silicon microcantilever in free air space," IET Micro & Nano Letters 6 (2), 62-65 (2011).

  • 3. Jianqiang Ma, Ying Liu, Caipeng Chen, Baoqing Li, and Jiaru Chu, "Deformable mirrors based on piezoelectric unimorph microactuator array for adaptive optics correction," Optics Communications 284 (21), 5062-5066 (2011).

  • 4. Jianqiang Ma, Ying Liu, Ting He, Baoqing Li, and Jiaru Chu, "Double drive modes unimorph deformable mirror for low-cost adaptive optics," Applied optics 50 (29), 5647-5654 (2011).

  • 5. Li Wen, Hai Wang, Liwen He, Qiuping Zhang, Weiwei Xiang, and Jiaru Chu, "Design and fabrication of microcantilever probe integrated with microplasma reactor for maskless scanning plasma etching," Sensors and Actuators A: Physical 169 (2), 362-366 (2011).

  • 6. Jiawen Li, Qi Han, Yuhang Chen, Jiaru Chu, and Wenhao Huang, "Tunable structural colour on the basis of colloidal crystal," IET Micro & Nano Letters 6 (7), 530-533 (2011).
  • 7. Fang Liu, Christopher S Roper, Jiaru Chu, Carlo Carraro, and Roya Maboudian, "Corrosion mechanism and surface passivation strategies of polycrystalline silicon electrodes," Sensors and Actuators A: Physical 166 (2), 201-206 (2011).

  • 8. Hao Fu, Cunding Liu, Yong Liu, Jiaru Chu, and Gengyu Cao, "Selective photothermal self-excitation of mechanical modes of a micro-cantilever for force microscopy," Applied Physics Letters 99 (17), 173501 (2011).

  • 9. C. Leili, W. Li, Y. Zhen, N. Dun, H. Liwen, and C. Jiaru, "A method of tip-sample distance control based on electrostatic force in maskless microplasma scanning etching," 2011 International Conference on Electronics and Optoelectronics (ICEOE 2011) (2011).

  • 10. J. Ma, Y. Liu, Y. Liu, B. Li, and J. Chu, "Optical Correction Capability of Piezoelectric Deformable Mirror Based on Unimorph Microactuator Array,"  SPIE, Vol. 8191, p. 81910Y (2011).

  • 11. Xiang Wang, Jijun He, Jianqiang Ma, Junjun Ding, Jiaru Chu, and Wenhao Huang, "Resolution improvement of femtosecond laser induced two-photon polymerization based on phase filtering," Optical Engineering 50 (5), 054302-054302-054306 (2011).

  • 12. W. W. Xiang, L. Wen, Q. P. Zhang, and J. R. Chu, "Fabrication of Nano-Aperture Hollow Tip Array for Microplasma Etching," Key Engineering Materials Vol. 483 (2011).

  • 13. Y. Zhen, W. Li, C. Leili, H. Liwen, and C. Jiaru, "Calculation and Simulation of the Bending Deformation of Multilayer Thin Films Microcantilever Integrated with the Microplasma Reactor," 2011 International Conference on Electronics and Optoelectronics (ICEOE 2011) (2011).

  • 14. L. Wen, Z. Yuan, L. L. Cheng, L. W. He, H. Wang, and J. R. Chu, "Characteristics of inverted pyramidal microdischarge devices operating in CHF3 and CHF3/Ar for maskless microplasma etching," TRANSDUCERS,11, pp. 454-457 (2011).

  • 15. W. Li, Z. Hongjiang, Y. Zheng, C. Jiaru, and W. Hai, "Simulation and experiments of intrinsic bending of multilayer microcantilever for maskless scanning plasma etching," Proceedings of the 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2011) (2011).

  • 16. 马剑强, 李保庆, 张晋弘, 许晓慧,褚家如.用于MEMS变形镜的双电极压电厚膜致动器, 纳米技术与精密工程, Vol. 9(5), pp. 427-431 (2011).

  • 17. 荣皓, 赵钢, 褚家如.用于热机械微纳加工的掺Al多晶硅加热器, 光学精密工程, Vol. 19(1), pp. 124-133 (2011).

  • 18. 文莉, 向伟玮, 张秋萍, 王海, 何利文, 褚家如. 用于微等离子体无掩膜刻蚀的微悬臂梁探针的设计和加工, 纳米技术与精密工程, Vol. 19(3), pp. 275-278 (2011).

  • 19. 张秋萍, 文莉, 向伟玮, 曾洪江, 何利文,褚家如, 用于微放电器的聚酰亚胺绝缘层的工艺和性能研究,真空科学与技术学报, Vol. 31(1), pp. 114-118 (2011).

  • 20. 许兴中, 赵钢, 刘勇, 荣皓, 褚家如, 聚甲基丙烯酸甲酯薄膜的弹性模量测量研究, 现代制造工程, Vol. 8, pp. 1-5 (2011).