1999年发表论文

  • 1.Micro-fabrication of novel SFM device using Thick PZT bimorph, Journal of Mechanical Engineering Laboratory, Vol.53, No.1, pp.1-6 (1999).

  • 2. Tip Scanning dynamic SFM using Piezoelectric Cantilever for full wafer inspection, Jpn. J. Appl. Phys., Vol. 38(1999), Pt.1, No.12B, pp.7155-7158 (1999).

  • 3.A micro-fabricated scanning force microscope using a 3-dimensional piezoelectric T-shape actuator,Jpn. J. Appl. Phys., Vol. 38(1999), Pt.1, No.12B, pp.7180-7184 (1999).

  • 4.Measurements of piezoelectric coefficient of Pb(Zr,Ti)O3 thin film using a piezoelectric micro cantilever, Jpn. J. Appl. Phys. Vol.38(1999) No.12A,pp.L1482 - L1484 (1999).

  • 5.Smart Materials Thin Film Transducers and Their Applications to MEMS, Procedings of Asia-Pacific Symposium on Smart Materials and MEMS. pp285-290, Tsukuba (1999).

  • 6. The Effect of the Roughness on Room Temperature Bonding of Metals to Ceramics,CERAMICS:GETTINGG INTO THE 2000’S Part C, pp.1091-1096, ISBN88-86538-16-2 (1999).