1. Yong Liu, Gang Zhao, Baoqing Li, Li Wen, and Jiaru Chu, "Pattern buried oxide in silicon-on-insulator-based fabrication of floppy single-crystal-silicon cantilevers," IET Micro & Nano Letters 6 (4), 240-243 (2011).
2. Yong Liu, Gang Zhao, Li Wen, Xingzhong Xu, and Jiaru Chu, "Mass-loading effect on quality factor of floppy silicon microcantilever in free air space," IET Micro & Nano Letters 6 (2), 62-65 (2011).
3. Jianqiang Ma, Ying Liu, Caipeng Chen, Baoqing Li, and Jiaru Chu, "Deformable mirrors based on piezoelectric unimorph microactuator array for adaptive optics correction," Optics Communications 284 (21), 5062-5066 (2011).
4. Jianqiang Ma, Ying Liu, Ting He, Baoqing Li, and Jiaru Chu, "Double drive modes unimorph deformable mirror for low-cost adaptive optics," Applied optics 50 (29), 5647-5654 (2011).
5. Li Wen, Hai Wang, Liwen He, Qiuping Zhang, Weiwei Xiang, and Jiaru Chu, "Design and fabrication of microcantilever probe integrated with microplasma reactor for maskless scanning plasma etching," Sensors and Actuators A: Physical 169 (2), 362-366 (2011).
6. Jiawen Li, Qi Han, Yuhang Chen, Jiaru Chu, and Wenhao Huang, "Tunable structural colour on the basis of colloidal crystal," IET Micro & Nano Letters 6 (7), 530-533 (2011).
7. Fang Liu, Christopher S Roper, Jiaru Chu, Carlo Carraro, and Roya Maboudian, "Corrosion mechanism and surface passivation strategies of polycrystalline silicon electrodes," Sensors and Actuators A: Physical 166 (2), 201-206 (2011).
8. Hao Fu, Cunding Liu, Yong Liu, Jiaru Chu, and Gengyu Cao, "Selective photothermal self-excitation of mechanical modes of a micro-cantilever for force microscopy," Applied Physics Letters 99 (17), 173501 (2011).
9. C. Leili, W. Li, Y. Zhen, N. Dun, H. Liwen, and C. Jiaru, "A method of tip-sample distance control based on electrostatic force in maskless microplasma scanning etching," 2011 International Conference on Electronics and Optoelectronics (ICEOE 2011) (2011).
10. J. Ma, Y. Liu, Y. Liu, B. Li, and J. Chu, "Optical Correction Capability of Piezoelectric Deformable Mirror Based on Unimorph Microactuator Array," SPIE, Vol. 8191, p. 81910Y (2011).
11. Xiang Wang, Jijun He, Jianqiang Ma, Junjun Ding, Jiaru Chu, and Wenhao Huang, "Resolution improvement of femtosecond laser induced two-photon polymerization based on phase filtering," Optical Engineering 50 (5), 054302-054302-054306 (2011).
12. W. W. Xiang, L. Wen, Q. P. Zhang, and J. R. Chu, "Fabrication of Nano-Aperture Hollow Tip Array for Microplasma Etching," Key Engineering Materials Vol. 483 (2011).
13. Y. Zhen, W. Li, C. Leili, H. Liwen, and C. Jiaru, "Calculation and Simulation of the Bending Deformation of Multilayer Thin Films Microcantilever Integrated with the Microplasma Reactor," 2011 International Conference on Electronics and Optoelectronics (ICEOE 2011) (2011).
14. L. Wen, Z. Yuan, L. L. Cheng, L. W. He, H. Wang, and J. R. Chu, "Characteristics of inverted pyramidal microdischarge devices operating in CHF3 and CHF3/Ar for maskless microplasma etching," TRANSDUCERS,11, pp. 454-457 (2011).
15. W. Li, Z. Hongjiang, Y. Zheng, C. Jiaru, and W. Hai, "Simulation and experiments of intrinsic bending of multilayer microcantilever for maskless scanning plasma etching," Proceedings of the 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2011) (2011).
16. 马剑强, 李保庆, 张晋弘, 许晓慧,褚家如.用于MEMS变形镜的双电极压电厚膜致动器, 纳米技术与精密工程, Vol. 9(5), pp. 427-431 (2011).
17. 荣皓, 赵钢, 褚家如.用于热机械微纳加工的掺Al多晶硅加热器, 光学精密工程, Vol. 19(1), pp. 124-133 (2011).
18. 文莉, 向伟玮, 张秋萍, 王海, 何利文, 褚家如. 用于微等离子体无掩膜刻蚀的微悬臂梁探针的设计和加工, 纳米技术与精密工程, Vol. 19(3), pp. 275-278 (2011).
19. 张秋萍, 文莉, 向伟玮, 曾洪江, 何利文,褚家如, 用于微放电器的聚酰亚胺绝缘层的工艺和性能研究,真空科学与技术学报, Vol. 31(1), pp. 114-118 (2011).
20. 许兴中, 赵钢, 刘勇, 荣皓, 褚家如, 聚甲基丙烯酸甲酯薄膜的弹性模量测量研究, 现代制造工程, Vol. 8, pp. 1-5 (2011).
